Semiconductor etching machine temperature control

electronic fluorine solution

Semiconductor etching machine temperature control

HOSCIEN HT-1200S, HT-1600S, HT-3283, HT-4043, ES-7200TKS electronic fluorine solution is a new generation of environmentally friendly products, with zero ODP value (ozone depletion value) and low temperature chamber effect value, meeting SGS Rohs and SGS halogen testing requirements, and has good electrical insulation properties. It can be widely used in insulation working fluid, thermal conductivity working fluid, precision leak detection, and convective evaporative cooling fields. HT-1200S, HT-1600S, HT-3283, HT-4043, ES-7200TKS are colorless and transparent liquid substances at room temperature, non-toxic and harmless, and nonflammable in air. They exhibit excellent safety, low environmental impact, and outstanding physical properties, making them a new generation of long-term stable HCFCs and substitute products for FC products. Long term stable use in the semiconductor and electronics industries for etching HT-8 landing period stable shore solution B45C, E5S equipment, electrical performance testing equipment, and as a temperature control refrigerant in the power industry

Key words:

Semiconductor etching machine temperature control

Classification:

Electronic fluoride liquid

Hotline:

8622-2859-9761

hanhongqi@hoscien.com

Consulting

Product characteristics

Safety

No flash point, non flammable, with good safety production practicality, low toxicity, protecting the personal safety of users, reducing risks, high thermal stability, normal use will not produce toxic substances with an ODP of 0, and will not damage the ozone layer

Environmentally

Low GWP value, reduced greenhouse gas emissions, ultra-low water solubility, reduced impact on aquatic animals and plants, good material compatibility, and most metals will not corrode

Applicability

Low surface tension, good wettability and leveling Wide liquid range, suitable for high and low temperature applications

Physical property

Properties	Conditions	HT-3283
Appearance	Not for specification purposes.All values are determined at 25°C unless otherwise specified	Clear,colorless liquid
Boiling Point		128℃
Pour Point		-65℃
Liquid specific gravity		1.8 g/ml@25℃
Surface tension		14.6 dyne/cm@25℃
Kinematic Viscosity		0.75 cst
Flash Point		None
Autoflammability		None
Water Solubility		20ppm
Breakdown Voltage		>40kv,(2.5mm,Kv,latm@25℃
Internal resistance		1x10¹5(ohm cm)
Vapor Pressure (Kpa)		1.4
Heat of Vaporization @boiling point (J/g)		78